, notional miniature machining or call micro computer report the system or miniature system is only OK batch makes, sensor of collect miniature orgnaization, miniature, miniature is carried out implement and signal processing and control circuit, even periphery interface. Its are main the characteristic has: Volume is minor (diagnostic size scope is: 1 μ M-10mm) , weight can low, function stabilizes light, waste time; Be helpful for large quantities of quantities producing, reduce manufacturing cost; Inertial small, syntonic frequency is tall, noisy should time is short; Intensive hi-tech achievement, additional cost is high. The purpose of miniature machinery depends on narrow measure and bulk not just, its target more changing at passing miniature, compositive change, the component that will search new principle, new function and system, open up domain of a new technology, form batch to change an industry. Miniature machining technology is to point to make the imperceptible processing technique that is machine. The occurrence of imperceptible treatment and development are early be with circuit of large scale integration closely related, integrated circuit requirement can contain more electronic element on the semiconductor of small area, in order to form the function is complex and perfect circuit. Circuit is imperceptible the width of the smallest line in design is to raise integrated circuit compositive spent crucial technology mark, machine pair of microelectronics industry imperceptibly and character machines measure one kind to go to what accept rice measures level to produce small size from micron namely yuan the advanced production technology of parts of an apparatus or light standard graph. At present miniature processing technique basically has be based on the silicon plane treatment that from semiconductor integrated circuit the development in machining craft imperceptibly rises and body to machine craft, 80 time metaphase is in the century later on LIGA is machined (miniature mould eletroplates craft) , accurate LIGA treatment, exceed treatment of imperceptible treatment, imperceptible electric spark (EDM) , plasma bundle treatment, electron beam treatment, fast prototype is made (RPM) and the respect of imperceptible treatment craft such as bond technology obtains quite great progress. System of micro computer weapon can finish the job that systematic place cannot complete report of large scale computer. Miniature machinery and electronic technology are united in wedlock cheek by jowl, the miniature parts of an apparatus that will make sort various comes out, these small parts of an apparatus use large quantities of amounts compositive make, the price is low, will apply at the mankind to live widely numerous domain. Can expect, inside this century, miniature machinery will be moved toward from the lab stage by stage applicable change, the progress that waits for a domain to medical treatment of industry and agriculture, information, environment, biology, space, national defence will produce major effect. A imperceptible machining technology is domain of technology of micro computer weapon very important and very active technology domain, its develop to be able to drive the development of a lot of relevant course not only, it is with national science and technology development, economy and national defence build be closely bound up more. The development of miniature machining technology is having tremendous industrialization application perspective. 2, abroad develops current situation 1959, richardPFeynman (1965 gainer of Nobel physics award) the tentative plan that offerred miniature machine. Pressure sensor of miniature of the first silicon came out 1962, climate development goes dimension to be 50 ～ turbine of pump of the gear of 500 μ M, gear, pneumatic and connection wait for small machine. 1965, stanford university develops bougie of electrode of head giving silicon, gain a success in respect of sensor of scanning channel microscope, miniature again later. Berkeley of American California university divided school development to give rotor diameter to be 60 ～ 1987 of 12 μ M use silicon miniature electrostatic machine, show use craft of silicon small treatment to create small movable structure as compatible as integrated circuit in order to create the potential of small system. Miniature machinery already was taken seriously in abroad by the height of government sector, business circles, colleges and universities and research organization. 15 scientists that American MIT, Berkeley, StanfordAT&T mixes are going up 80 time end puts forward the century " small machine, great opportunity: About burgeoning domain- - the national proposal book of the report " with mechanical jiggle, claim " because jiggle is mechanical (small system) the pressing sex that is in the United States, answer to walk along advanced face " in the competition of a such new main technique fields and other country, finance advances charge to be 5 years in the center of the proposal 50 million dollar, get American leader orgnaization takes seriously, invest energetically continuously, regard the 3 big focal points that science and technology grows as aerospace, information and MEMS. Bureau of American space navigation invests 100 million dollar to begin to develop " to discover " of date miniature satellite, american national science foundation can regard as MEMS new the plan that rise research domain made the research that funds system of miniature electron machine, begin from 1998, aid financially MIT, 8 universities such as California university and shellfish Er lab pursue the research of this one domain and development, year aid financially the forehead from 1 million, the 2 million 5 million dollar that is added to 1993. Released 1994 " technology of American department of defense plans " report, label MEMS crucial technology project. Bureau of advanced research plan leads American department of defense actively and support the research of MEMS and martial application, already built line of craft of standard of a MEMS now in order to promote new-style cell / the research of device and development. American industry basically devotes oneself to the sensor such as appearance of sensor, displacement sensor, meet an emergency and acceleration watch to concern the research of the domain. A lot of orgnaizations participated the research of system of micro computer weapon, like university of health Nai Er, Stanford university, California university Berkeley is divided school, close hold install university, Weisikang astral university, old Lun Ci gets Home Mo Erguo to consider to wait. Sensor of benefit of gram of California university uncle and carry out implement center (BSAC) after getting the department of defense and ten companies aid financially 15 million yuan, built what 1115m2 considers to develop MEMS to exceed clean lab. Japan is connected produce a province to began to start a by a definite date 10 years 1991, large research plans the miniature that costs 25 billion yen, develop two prototype, one is used at medical treatment, enter human body to undertake diagnostic mixing miniature operation, another is used at industry, carry out maintenance to the tiny flaw of aircraft engine and nuclear energy equipment. This plan has build university of cropland of wave university, Tokyo industry university, northeast university, early rice and Fuji to connect a few units such as the institute to attend. European industry developed country also undertook to the research development of miniature system the key invests in succession, germany begins small treatment 10 years to plan a project from 1988, ministry of its science and technology allocated funds 1993 at 1990 ～ research of " of plan of small system of " of support of 40 thousand mark, rate small system the stress that the science and technology at the beginning of this century develops, the LIGA craft of German initiate, the development that is MEMS provided new technical measure, the actor that already became three-dimensional structure to make chooses technology. The " small system of the 70 million franc that France started 1993 and technical " project. Europe in all body composition " is muti_function NEXUS" of network of small system research, coordinate the research of 46 institutes jointly. Switzerland is mixed in its traditional horological production industry the development that MEMS also threw on the foundation of small-sized and accurate mechanical industry works, investment was 10 million dollar 1992. British government also formulate Namike learns a plan. List in the domain such as mechanical, optical, electronics 8 projects have research and development. Develop the power of MEMS to strengthen Europe, company of a few Europe already comprised MEMS to develop a group. At present already much miniature machinery or miniature system are excogitated to come, for example: The miniature forceps that most advanced diameter is 5 μ M is OK an erythrocyte since clip, the miniature pump discharge that dimension is 2mm of × of 7mm × 7mm can amount to 250 μ L/min can the car of actuate, in the machine butterfly that flies in magnetic field, and the miniature that top of collect miniature speedometer, miniature and signal processing system are an organic whole is inertial combine (MIMU) . Germany created LIGA craft, made cantilever bridge, actuator and miniature pump, miniature nozzle, humidity, flow transducer and a variety of optical parts of an apparatus. American California technical institute is stuck in plane ala face photogenic the small bridge of the 1mm when the amount, control its angle of bend to spend the aerodynamics character with affecting a plane. The silicon that American big batch produces accelerometer miniature sensor (mechanical part) with integrated circuit (telegraphic number source, amplifier, signal is handled and road of check positive electricity) together compositive inside the limits in 3mm of × of the 3mm on silicon chip. The miniature lathe of several centimeters of square that Japan develops can machine precision to amount to 1. The imperceptible axis of 5 μ M. 3, our country of domestic current situation is in fund of nature of ministry of science and technology, country appoint, of Ministry of Education and total equipment ministry aid financially below, dogging all the time research of micro computer instrument, begin the research of MEMS actively. Existing microelectronics equipment and synchrotron offerred postulate for small system, the development of imperceptible driver and miniature robot includes a country 863 hi-tech already in plan and ascend plan B. Already had group of nearly 40 research, obtained a few more the following research achievement. Guangdong industry university and Japan build wave university cooperation, began biology and medical the research of miniature robot, already developed drive of pottery and porcelain of report of dynamic pressure of couplet of an one dimension, 2 dimension, its displacement limits is × of 10 μ M 10 μ M; Displacement resolution is 0.
01 μ M, precision is 0.
1 μ M, developing 6 freedom to spend miniature robot; Instrument of the electric machinery suppressing report that long spring scenery learns accurate machine institute to develop a diameter to be Φ 3mm, electromagnetism electric machinery, small test and small operating system. Development of Shanghai metallurgy institute gave compose of Liang Jie of electrical micro-machine, polycrystalline silicon, tiny pump and a powerful person. Shanghai traffic university manufactures the electromagnetism electric machinery of 2mm giving Φ , the research that the university opened to begin miniature robot to control a technology south. Our country had a lot of orgnaizations to begin corresponding research to the method that a variety of micro computer instrument machine, already laid certain treatment foundation, can have silicon plane treatment of treatment and body silicon treatment, LIGA treatment, imperceptible electric spark and treatment of law of stereo photoetching model. 4, the development of technology of machining of miniature of technical development trend just experienced ten years, a batch of tiny parts of an apparatus and system developed while processing technique develops ceaselessly, showed tremendous vitality. The miniature machinery product that produces as large quantities of quantities, will with its the price is low gain the market with good performance, in biology project, chemical, differential analyse, optical, national defence, spaceflight, industry control, medical treatment, communication reachs information processing, agriculture and domestic service to wait for a domain to having potential tremendous application perspective. Current, if the miniature machinery product that produces as large quantities of quantities is miniature pressure sensor, imperceptible the head of accelerometer and ink jet that print is already occupational huge market. Adjust with the fluid on the market at present give priority to with system of cable of pilot personal computer, it is pressure sensor and inertial sensor next. The sale of global miniature machinery was 1.5 billion dollar 1995, somebody predicts 2002, relevant product value will reach 40 billion dollar. Apparent miniature machinery and its processing technique are having huge market and economic benefits. Miniature machinery is one makes * science, the development of the each technology related to it can make the progress of miniature machinery. Learn as microelectronics, material, informatics the ceaseless development that wait, miniature machinery had better development base. Because its apply the attention of foreground and economic benefits and government, enterprise tremendously, development of micro computer instrument is sure to have greater leap. The small sensor of system of new principle, new function, new structure, small carry out implement will appear ceaselessly with the system, can embed large mechanical facility, raise automation and intelligent level. Miniature machining technology regards miniature as mechanical the most crucial technology, also be sure to have a great progress. The material character that silicon treatment, LIGA treatment and accurate LIGA treatment are siding with more complex, taller deepness to fit all sorts of requirements and the small structure with characteristic surface and make different material especially functional material small composition, more develop with the direction with compositive circuit easily, a variety of processing technique union also are his important way. The implementation way that miniature machinery is siding with the design system that has structure and the characteristic analysis that parts of an apparatus and system implement while craft is designed and opinion in design respect develops, introduce virtual reality technology. The preferential development field that our country develops in miniature processing technique is the domain such as monitoring of biology, environment, aerospace, industry and national defence, the miniature machine that construction has world advanced level several times considers to develop base, also take the research of the new physics phenomenon on microcosmic measure and new effect seriously at the same time, accelerate the research of machinery of our country miniature and development, meet the challenge of 21 centuries technology and industrial revolution. 5, machinery of crucial technology miniature is burgeoning, the high-tech field that much discipline makes * , face a lot of tasks, involve a lot of crucial technologies. When the diagnostic dimension when a system reachs micron class and accept rice level, will produce a lot of new scientific issues. For example as dimension decrease, express area and bulk than increasing, effect of physics of mechanical, surface will have the face dominant action, be designed traditionally and analyse methodological general no longer applicable. For force of tribology, low-grade fever the problem such as this is in small system lieutenant general is crucial. Small system scale effect considers to will conduce to the innovation of small system. Miniature machinery is not traditional and mechanical direct miniature is changed, its Yuan Chao gave the concept of traditional machinery and scope. Miniature machinery is mixed in scale effect, structure, material, production method the respect such as working principle, as disparate as traditional machinery. The research of character of the scale effect of small system, physics, design, important research content that make and checking research is small system domain. In the research work respect of small system, a few domestic and international research organizations already were in effect of small miniaturization dimension, sensor of material of imperceptible treatment craft, micro computer instrument and miniature structural member, miniature, miniature is carried out implement, micro computer compose measures fluid of technology, minim the respect such as compositive control and application acquires control and small system the level sex achievement of different level. Miniature machining technology is the crucial foundation technology that miniature machinery develops, include miniature mechanical design to machinery of imperceptible processing technique, miniature is assembled and be enclosed among them the technology, token that is a system and survey technology and small system compositive technology. 6, technology of forward position key 1, technology of small system design basically is database of small structure design, finite yuan be emulated with attrib border analysis, CAD/CAM and draft real skill, small system to build a model to wait, the dimension effect of small miniaturization and small small-sized and academic basic research also are the task with design indispensable research, be like: Mechanism of effect of the dimension effect of force, small structure surface, microcosmic attrition, heat is conducted, error effect and function of material of small component part. 2, deepness of main finger height compares imperceptible processing technique multilayer the silicon surface treatment of small structure and body processing technique, the LIGA that uses X ray photoetching, electroform grants LIGA processing technique with what use ultraviolet ray; Processing technique of nicety of small structure special type includes small scintilla treatment, can bundle form cutting of treatment, stereo photoetching; Special material especially the processing technique of functional material small composition; A variety of union that machine a method; The compositive technology of small system; Machine new technology exploration to wait imperceptibly. 3, miniature machinery is assembled and enclose a technology to basically point to touch those who receive data to stick receive, silicon glass is electrostatic receive, bond technology mixes silicon silicon to assemble a technology from alignment, have three-dimensional and movable part enclose technology, vacuum to enclose a technology to wait new the exploration that encloses a technology. 4, the token of small system and test technology basically have structural material character to test a technology, the measurement of the physical quantity such as tiny and mechanical, electricity technology, the token of miniature parts of an apparatus and miniature system performance and test technology, character of miniature system trends tests a technology, miniature parts of an apparatus and miniature system but the measurement of * sex and evaluation technology. CNC Milling